silicon carbide ceramic robotic arm

silicon carbide ceramic robotic arm

3 week ago

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Shaanxi Puwei Electronic Technology Co., Ltd

 7 month year

Product details

Semiconductor Manufacturing SiC Ceramic Robotic Arm

Silicon carbide ceramic robotic arms in semiconductor manufacturing are really advanced and super important tools. They have lots of amazing features that make them absolutely necessary in this industry.

They're great at resisting high temperatures. So, they can work steadily during the high-temperature steps in semiconductor manufacturing, like when it comes to epitaxial growth and ion implantation. They won't get deformed or damaged. Their chemical resistance is also outstanding. They can handle the corrosive chemicals and gases that are used in the production process. This makes sure that the manufacturing environment stays pure and stops corrosion and contamination from happening.

When it comes to applications, they're really important for wafer transfer. They can pick up wafers and put them in the right place between different pieces of process equipment accurately and steadily. That helps to make sure the wafers are of good quality. They're also widely used in precision processing. They can control the movement and position of processing tools precisely, which meets the high precision and stability requirements for etching and lithography. What's more, they're good for cleanroom environments because they don't give off any particles or release impurities when they're working. This reduces the risk of the wafers getting contaminated.

Applications in Semiconductor Manufacturing

Wafer Transfer: In the semiconductor manufacturing process, wafers need to be transferred between different process equipment. The silicon carbide ceramic robotic arm can accurately and stably pick up and place wafers with its high precision and reliability, avoiding wafer breakage and scratches and ensuring the quality of the wafers.

Precision Processing: In some precision processing processes such as etching and lithography, the robotic arm needs to have extremely high precision and stability. The silicon carbide ceramic robotic arm can meet these requirements and can accurately control the movement and position of the processing tool to ensure the accuracy and consistency of the processing.

Cleanroom Environment: The semiconductor manufacturing process requires a cleanroom environment with extremely low particulate and impurity levels. Silicon carbide ceramic robotic arms do not shed particles or release impurities during operation, which helps maintain the cleanliness of the cleanroom and reduces the risk of wafer contamination.

Future Development Trends

Higher Precision and Speed: With the continuous development of semiconductor technology, the requirements for the precision and speed of robotic arms are also increasing. Future silicon carbide ceramic robotic arms will continue to improve in these aspects to meet the needs of more advanced semiconductor manufacturing processes.

Intelligent and Automated: The combination of silicon carbide ceramic robotic arms and advanced sensors and control systems will make them more intelligent and automated. They will be able to automatically sense the environment and wafers, make decisions and adjustments, and improve production efficiency and quality.

Multifunctional Integration: In addition to the basic functions of wafer transfer and processing, future silicon carbide ceramic robotic arms may integrate more functions, such as wafer inspection, cleaning, and packaging, to form a multifunctional integrated system and further improve the automation and integration level of semiconductor manufacturing.

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Shaanxi Puwei Electronic Technology Co., Ltd

 Audited supplier

7 month

Address: Xian, China

Main Product: Alumina Ceramic Substrates, Aluminum Nitride Substrates, Metallized Ceramics , AlN Ceramics Disc, DPC Substrate, DBC Ceramic Substrate

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